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Table 10, VUV Toroidal Monochromator Gratings (TGM)
The
manufacturing of monochromators or spectrographs designed for far UV
and soft X-Ray necessitates the use of diffraction gratings at
grazing incidence (better efficiency of the reflection power of
coatings). But the considerable astigmatism of concave gratings at
grazing incidence gives very low energy throughput.
The
holographic gratings on a toroidal blank can be corrected for
astigmatism and coma and so permit to increase drastically the
throughput and still have a very good resolution.

|
VUV
TOROIDAL MONOCHROMATOR GRATINGS (TGM) |
|
Dev. (deg) |
Spect. Range
(in AU) |
Spect. Range
(in eV) |
Grooves
per mm |
Res. (AU) |
Size (mm)
h x w
x t |
LA (mm) |
LB (mm) |
Ion
Etched Ref. No. |
|
172 |
18-27 |
690-460 |
1800 |
0.007 |
45x160x30 |
2927 |
7045 |
540 01 300 |
|
172 |
27-40 |
460-310 |
1200 |
0.011 |
45x160x30 |
2927 |
7045 |
540 01 310 |
|
172 |
40-60 |
310-207 |
800 |
0.016 |
45x160x30 |
2927 |
7045 |
540 01 320 |
|
166 |
30-100 |
413-124 |
600 |
0.05 |
50x210x45 |
2961 |
4332 |
540 00 100 |
|
166 |
100-333 |
124-37 |
180 |
0.17 |
50x210x45 |
2961 |
4332 |
540 00 110 |
|
162 |
40-120 |
310-100 |
1800 |
0.12 |
30x90x20 |
1000 |
1415 |
540 00 200 |
|
162 |
120-360 |
100-35 |
600 |
0.36 |
30x90 x20 |
1000 |
1415 |
540 00 210 |
|
162 |
360-1000 |
35-12 |
200 |
1.1 |
30x90x20 |
1000 |
1415 |
540 00 220 |
|
162 |
60-180 |
207-69 |
1800 |
0.32 |
35x150x25 |
1500 |
2634 |
540 01 100 |
|
162 |
90-270 |
138-46 |
1200 |
0.5 |
35x150x25 |
1500 |
2634 |
540 01 130 |
|
162 |
180-540 |
69-23 |
600 |
0.95 |
35x150x25 |
1500 |
2634 |
540 01 110 |
|
162 |
540-1620 |
23-8 |
200 |
2.84 |
35x150x25 |
1500 |
2634 |
540 01 120 |
|
161 |
60-200 |
207-62 |
1200 |
0.24 |
30x100x30 |
880.4 |
1127 |
540 00 400 |
|
161 |
200-800 |
62-16 |
450 |
0.80 |
30x100x30 |
880.4 |
1127 |
540 00 410 |
|
160 |
50-105 |
248-118 |
3000 |
0.08 |
30x135x30 |
2166 |
3493 |
540 00 300 |
|
160 |
60-120 |
207-103 |
2250 |
0.07 |
30x135x30 |
2166 |
3493 |
540 00 330 |
|
160 |
100-210 |
124-59 |
1500 |
0.16 |
30x135x30 |
2166 |
3493 |
540 00 310 |
|
160 |
200-420 |
69-29 |
750 |
0.31 |
30x135x30 |
2166 |
3493 |
540 00 320 |
|
160 |
70-175 |
177-71 |
2400 |
0.06 |
45x135x30 |
2112 |
3888 |
540 01 200 |
|
160 |
175-500 |
71-25 |
823 |
0.17 |
45x135x30 |
2112 |
3888 |
540 01 210 |
|
160 |
500-1415 |
25-9 |
288 |
0.50 |
45x135x30 |
2112 |
3888 |
540 01 220 |
|
150 |
125-300 |
100-41 |
2400 |
0.09 |
20x120x25 |
888.5 |
1663 |
540 00 500 |
|
150 |
166-400 |
75-31 |
1800 |
0.12 |
20x120x25 |
888.5 |
1663 |
540 00 530 |
|
150 |
250-600 |
50-20 |
1200 |
0.18 |
20x120x25 |
888.5 |
1663 |
540 00 510 |
|
150 |
500-1200 |
25-10 |
600 |
0.36 |
20x120x25 |
888.5 |
1663 |
540 00 520 |
|
150 |
80-320 |
155-39 |
1800 |
0.35 |
45x90x30 |
1146 |
1927 |
540 00 600 |
|
150 |
320-1280 |
39-10 |
450 |
1.40 |
45x90x30 |
1146 |
1927 |
540 00 610 |
|
146 |
125-525 |
100-23 |
950 |
0.58 |
30x110x30 |
1000 |
1168 |
540 00 800 |
|
146 |
500-2000 |
25-6 |
250 |
2.19 |
30x110x30 |
1000 |
1168 |
540 00 810 |
|
142 |
100-500 |
124-25 |
550 |
2.8 |
31x31x15 |
319.9 |
319.5 |
540 00 900 |
|
142 |
150-1500 |
82-8 |
550 |
5.7 |
31x31x15 |
319.9 |
319.5 |
540 00 910 |
|
142 |
500-3000 |
25-4 |
275 |
12.2 |
31x31x15 |
319.9 |
319.5 |
540 00 920 |
|