DIGISCREEN - Film Thickness Measurement for Flat Panel Displays

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Film Thickness Measurement System for Flat Panel Displays

The DIGISCREEN61" film thickness measurement system is specifically designed to measure layer thickness uniformity over large substrates for the Flat Panel Display industry.

The system's large table is capable of holding substrates up to 1.2 x 1.0 m (61" diagonal) and as the table is almost vertical the tool's footprint is reduced to 2.5 m wide by 1.1m deep. The system uses multi-channel spectroscopic reflectometry to perform a film thickness measurement in under a second and can fully characterise a sample at 60 different points within five minutes.

The system has been optimised to characterise thin films used by the flat panel display industry, including SiN, SiON, a-Si, p-Si, µc-Si over thickness ranges 120 to 1000 nm and SiOx from 300 to 1000 nm on either glass or metal coated glass substrates.

Comprehensive Windows NT based software allows both operators to produce homogeneity maps and engineers to optimise previously acquired results using an extensive materials database

APPLICATIONS

Thickness measurement of thin film layers used in Flat Panel Displays including: SiN, SiON, a-Si, p-Si, µc-Si and SiOx

Automated thickness homogeneity mapping of samples up to 1.2 x 1.0 m

MAIN SPECIFICATIONS

Detector :

CCD based spectrograph

Layer thickness range:

SiN, SiON: 120 to 1,000 nm;

SiOx: 300 to 1,000 nm

a-SI, p-Si, µc-Si: 120 to 1,000 nm

Measurement accuracy :

SiN, SiON: 120 to 400 nm ± 3% ; 400 to 1,000 nm ± 1%

SiOx: 300 to 1,000 nm ± 2%

a-SI, p-Si, µc-Si: 120 to 400 nm ± 3%; 400 to 1,000 nm ± 1%

Substrate type :

Glass and metal coated glass

Substrate size:

150 x 150 mm to 1000 x 1200 mm and any size in between

Substrate thickness :

0.3 mm to 3mm and any size in between

Measurement speed :

< 1sec per point

Mapping speed :

< 5min for 60 mapping points over 1x1.2m substrate

Measurable area :

any point within 2mm from substrate edges.

Positioning accuracy :

< 0.1 mm horizontal < 0.2 mm vertical

Software :

Windows NT based. Includes easy to use homogeneity mapping along with minimum, maximum, average and uniformity of the measured layer thickness. All data is stored in a database for later analysis, if required. Additionally a password protected engineering mode enables full instrument control and comprehensive data analysis using an extensive materials database.