Dual OES Systems for Enhanced Endpoint Detection
Jobin Yvons OES
systems are also available with two monochromators, this allows two
different wavelengths to be monitored simultaneously. These signals
can also be ratioed in real time to enhance endpoint detection
capabilities particularly for very low exposed area applications.
Ratio Signal = Signal of
Wavelength 1 / Signal of Wavelength 2
SCHEMATICALLY

MAIN BENEFITS
Reduces effects of plasma fluctuations.
Increases accuracy and
reliability of endpoint detection for low exposed areas.
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