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Jobin Yvon, suppliers of spectroscopic equipment including Raman, Fluorescence and Trace Analysis.

Dual OES

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Thicknesses, refractive indices and absorption constants

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Thin dielectric and transparent film

Real-time process monitoring

Ultra-thin gate oxide (UTGO) layer thicknesses

Pulsed Plasma Monitoring

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Dual OES Systems for Enhanced Endpoint Detection

Jobin Yvon’s OES systems are also available with two monochromators, this allows two different wavelengths to be monitored simultaneously. These signals can also be ratioed in real time to enhance endpoint detection capabilities particularly for very low exposed area applications.

Ratio Signal = Signal of Wavelength 1 / Signal of Wavelength 2

 

SCHEMATICALLY

MAIN BENEFITS

Reduces effects of plasma fluctuations.

Increases accuracy and reliability of endpoint detection for low exposed areas.

 

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