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Thin Film Links Introduction Ellipsometry Applications Basic Principles Ex-Situ UVISEL In-Situ UVISEL Optical Set-up PZ 2000 PQ Ruby Software Process Control DIGISEM DIGILEM DIGITWIN PlasmaScope MULTISEM User Guide Laboratory Applications Automatic thin-film measurement Thin Film Metrology Surface Chemistry Surface Cleanliness HMDS Process Reflectance Difference Spectroscopy (RDS)  Process Applications EPD at Interfaces EPD at Depths Optical Emission Spectroscopy Thicknesses, refractive indices and absorption constants Depth Targeting for MEMS III-V Process Control Flat Panel Display Film Thickness Thin dielectric and transparent film Real-time process monitoring Ultra-thin gate oxide (UTGO) layer thicknesses Pulsed Plasma Monitoring  Tell Me More Detailed Product Information Form Quick Request Please send me more information on:  Ellipsometry Process Control Country Your e-mail Semiconductors and Electronics Si based structures - c-Si, a-Si, p-Si, silicides, a-Si:H DRAM and memory III-V - GaAs, IngaAs, AlGaAs, InGaAsP, InP, InSb etc II-Vi - CMT, ZnSe etc Nitrides - GaN, Si3N4, SiON Oxide on silicon, copper, aluminium Compound semiconductors and alloys - SiGe Epitaxial films (MBE, CVD) Hetero structures HBT HEMT Photoresist High K dielectric films - Ta2O5, ZrO2, TiO2, Y2O3, Al2O3, SrTiO3 (STO), BaSrTiO3 (BST), PbZrxTi1-xO3 (PZT) Low K dielectric films Polymer electronics Polymers and Organic Films Self assembled monolayers - SAM Polyimide Liquid crystals Langmuir-Blodgett (L-B) films Oil films Polymer electronics Polymer LED Polymer lasers Conjugated polymers - PPV, PPCA Copolymers Polymer waveguides Dielectrics TEOS, oxides, BPSG, buried insulators, nitrides, oxynitrides, Al2O3 Conducting materials Metals Liquid metals Transparent conducting oxides (TCO) - ITO, SnO2, ZnO Biological Films and Membranes Protein migration Protein adhesion Lipids Biosensors Optical Coatings High refractive index Low refractive index Antireflective (AR) coatings AR Birefringent coatings Rugate filters Multilayers Optoelectronics Optical waveguides LED Laser VCSEL, OPSL structures Display Technology Large area displays Flat panel displays (FPD) Electroluminescent materials TFT display Polymers Liquid crystal Metals Liquid metals Oxide films Corrosion Solar Cells Silicon Compound semiconductors and alloys CdS, CdTe, ZnO etc Others Diamond-like carbon Glass High Tc superconductors Anisotropic materials Ultrathin dielectric films

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