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Jobin Yvon
ellipsometers combine two key elements - phase modulation and an
entirely numerical data acquisition and processing system. It allows
real-time measurements two orders of magnitude faster than classical
ellipsometers. For industrial research or analytical laboratories,
our ellipsometry products are the safest, easiest to operate, and
most flexible instruments available.
Founded
more than 175 years ago, our company has developed the original ideas
of illustrious scientists such as J.B. Soleil, Arago, Babinet... From
the beginning, highly sensitive optical instruments were built to
measure the properties of light and of natural samples (sugar,
quinine...). The first polarimeter, by Laurent, dates back to 1872
and was already world famous at that time. Jobin Yvon-Spex has long
been involved in thin films analysis through Raman
spectroscopy, photoluminescence
and plasma emission. Pursuing a
tradition of innovation, we acquired in 1989 the license for a phase
modulated ellipsometer developed in collaboration with CNRS
laboratories and successfully developed a broad variety of spectroscopic
ellipsometry systems. Jobin Yvon also acquired the Plasmos
Laser Ellipsometer range from Philips Analytical in 2002.
Our systems
respond to the need of research and fabrication engineers for high
performance characterisation techniques, in the semiconductor and
optical thin film industries. Combined with excellence in optical
instrumentation, we provide customers with expertise in materials
characterisation and thin film analysis. Continuous improvement of
our complete product line and analysis software provides the best
solution for your specific application.
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Your
Process Application |
The
JY Solution |
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Thicknesses, refractive
indices and absorption constants |
PQ
Ruby |
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Thin dielectric and
transparent film |
PQ
Ruby |
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Ultra-thin gate oxide
(UTGO) layer thicknesses |
PQ
Ruby |
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Real-time process monitoring |
in
situ UVISEL |
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Your
Laboratory Application |
The
JY Solution |
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Thin Film Metrology
Thickness and composition Optical properties Mapping |
ex
situ UVISEL |
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Automatic thin-film measurement |
PZ
2000 |
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Surface Chemistry, Structure
Measurement real time control |
RDS |
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