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Jobin Yvon, suppliers of spectroscopic enquipment including Raman, Fluorescence and Trace Analysis.

Ellipsometry

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Introduction

Ellipsometry
Applications
Basic Principles
Ex-Situ UVISEL
In-Situ UVISEL
Optical Set-up
PZ 2000
PQ Ruby
Software

Process Control
DIGISEM
DIGILEM
DIGITWIN
PlasmaScope
MULTISEM
User Guide

Contact Angle

Laboratory Applications

Automatic thin-film measurement

Thin Film Metrology

Surface Chemistry

Surface Cleanliness

HMDS Process

Reflectance Difference Spectroscopy (RDS)

 Process Applications

EPD at Interfaces

EPD at Depths

Optical Emission Spectroscopy

Thicknesses, refractive indices and absorption constants

Depth Targeting for MEMS

III-V Process Control

Flat Panel Display Film Thickness

Thin dielectric and transparent film

Real-time process monitoring

Ultra-thin gate oxide (UTGO) layer thicknesses

Pulsed Plasma Monitoring

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Jobin Yvon ellipsometers combine two key elements - phase modulation and an entirely numerical data acquisition and processing system. It allows real-time measurements two orders of magnitude faster than classical ellipsometers. For industrial research or analytical laboratories, our ellipsometry products are the safest, easiest to operate, and most flexible instruments available.

Founded more than 175 years ago, our company has developed the original ideas of illustrious scientists such as J.B. Soleil, Arago, Babinet... From the beginning, highly sensitive optical instruments were built to measure the properties of light and of natural samples (sugar, quinine...). The first polarimeter, by Laurent, dates back to 1872 and was already world famous at that time. Jobin Yvon-Spex has long been involved in thin films analysis through Raman spectroscopy, photoluminescence and plasma emission. Pursuing a tradition of innovation, we acquired in 1989 the license for a phase modulated ellipsometer developed in collaboration with CNRS laboratories and successfully developed a broad variety of spectroscopic ellipsometry systems. Jobin Yvon also acquired the Plasmos Laser Ellipsometer range from Philips Analytical in 2002.

Our systems respond to the need of research and fabrication engineers for high performance characterisation techniques, in the semiconductor and optical thin film industries. Combined with excellence in optical instrumentation, we provide customers with expertise in materials characterisation and thin film analysis. Continuous improvement of our complete product line and analysis software provides the best solution for your specific application.

Your Process Application

The JY Solution

Thicknesses, refractive indices and absorption constants

PQ Ruby

Thin dielectric and transparent film

PQ Ruby

Ultra-thin gate oxide (UTGO) layer thicknesses

PQ Ruby

Real-time process monitoring

in situ UVISEL

Your Laboratory Application

The JY Solution

Thin Film Metrology Thickness and composition Optical properties Mapping

ex situ UVISEL

Automatic thin-film measurement

PZ 2000

Surface Chemistry, Structure
Measurement real time control

RDS

Also look at:

An explanation of Spectroscopic Ellipsometry

The optical setup of the UVISEL

Ellipsometry Software

 

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