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Thin Film Division

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Introduction

Ellipsometry
Applications
Basic Principles
Ex-Situ UVISEL
In-Situ UVISEL
Optical Set-up
PZ 2000
PQ Ruby
Software

Process Control
DIGISEM
DIGILEM
DIGITWIN
PlasmaScope
MULTISEM
User Guide

Laboratory Applications

Automatic thin-film measurement

Thin Film Metrology

Surface Chemistry

Surface Cleanliness

HMDS Process

Reflectance Difference Spectroscopy (RDS)

 Process Applications

EPD at Interfaces

EPD at Depths

Optical Emission Spectroscopy

Thicknesses, refractive indices and absorption constants

Depth Targeting for MEMS

III-V Process Control

Flat Panel Display Film Thickness

Thin dielectric and transparent film

Real-time process monitoring

Ultra-thin gate oxide (UTGO) layer thicknesses

Pulsed Plasma Monitoring

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The Thin Film Division was created by combining the cumulative experience of Jobin Yvon in optics with the expertise and almost twenty years experience of SOFIE Instruments in thin film processing and plasma diagnostics.

By a process of continuous collaboration with major semiconductor manufacturers, research establishments and plasma processing equipment suppliers the Thin Film Division has developed a wide range of instruments dedicated to advanced thin film metrology such as Ellipsometry, Optical Emission Spectroscopy (OES) and Interferometry, covered by two product lines : Ellipsometry and Process Control.

 

Thin Film Division Headquarters located in Chilly Mazarin - France

Internal view of the Thin Film Headquarters

Our instruments are manufactured under a strict quality assurance program with the aim to satisfy customer needs by the highest level of performance.

Jobin Yvon acquired the licence for a Phase Modulated Ellipsometer developed in collaboration with CNRS laboratories (Anvar-Ecole Polytechnique license). In 1992 this collaboration won an Award for research-to-industry technology transfer. Jobin Yvon Spectroscopic Ellipsometers provide the highest level of performance currently available with continuous improvement in terms of hardware performance and analysis software. Jobin Yvon also acquired the Plasmos Laser Ellipsometer range from Philips Analytical in 2002.

 

Leader in the market for in-situ real-time process monitoring equipment, the competitive edge of the process control product line is based on the originality of the architecture, smart sensor technology, analytical methodology and unique signal processing.

This commitment to product excellence and continued support is part of JY's culture.

To give you easy access to our technologies and services, a global network through subsidiaries and distributors operates in more than 80 different countries as well as three application laboratories, based in France, USA and Japan, for your sample analysis. Today, more than 1500 instruments are running worldwide in Fabs, R&D labs and also embedded as OEM modules within etching equipment.

 

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