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Jobin Yvon Thin Film Division

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Introduction

Ellipsometry
Applications
Basic Principles
Ex-Situ UVISEL
In-Situ UVISEL
Optical Set-up
PZ 2000
PQ Ruby
Software

Process Control
DIGISEM
DIGILEM
DIGITWIN
PlasmaScope
MULTISEM
User Guide

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Thin Film Division Global Information

You have been transferred to the Jobin Yvon UK Web Site where we have detailed information on the products and services offered by the Jobin Yvon Thin Film Division world-wide.

Links to the Jobin Yvon Thin Film Division products can be found on the table to the left or you can use the search facility in the header bar of this and subsequent pages.

Applications

If you are unfamiliar with the Jobin Yvon Thin Film Division product range you can look for your application in the tables below.

Laboratory Applications

Automatic thin-film measurement

Thin Film Metrology

Surface Chemistry

Reflectance Difference Spectroscopy (RDS)

Ultra-thin gate oxides

Low-k dielectrics

193 nm ARC and resist

High-k dielectrics

SOI and poly-Si on oxide

Multi-layer stacks

 Process Applications

EPD at Interfaces

EPD at Depths

Optical Emission Spectroscopy

Thicknesses, refractive indices and absorption constants

Depth Targeting for MEMS

III-V Process Control

Flat Panel Display Film Thickness

Thin dielectric and transparent film

Real-time process monitoring

Ultra-thin gate oxide (UTGO) layer thicknesses

Pulsed Plasma Monitoring

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