Laser Ellipsometer - PZ2000, automatic thin-film measurement tool

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PZ2000

The PZ2000 ellipsometer is an automatic thin-film measurement tool for substrates of up to 200 mm diameter. It is capable of determining the thicknesses, refractive indices and absorption constants of the thinnest to the thickest films. Both transparent and absorbing films can be analysed. Its high precision, full upgradability, various software options, low cost of ownership and world-wide customer support make the PZ2000 ellipsometer a favourite production and R&D tool.

Typical applications:

Transparent films - such as oxides, nitrides, DL carbon and ARC. Absorbing films - such as poly and a-silicon, polyimide. Multilayers - such as ONO, OPO or CMP films.

The PZ 2000 Ellipsometer was previously sold by Philips Analytical and before that by Plasmos gmbh, Jobin Yvon acquired the product line in November 2002.