Aberration Corrected Spherical Holographic Grating, from Jobin Yvon

VUV Links

Index

VUV Monochromators

Vacuum UV Monochromators

Beamline Monochromators

Vacuum Toroidal Monograph

VUV Mirrors & Gratings

VUV Optics Index

Toroidal Mirror

Cylindrical Mirror

Spherical Mirror

Plane Mirror

Constant Ruling Density Plane Holographic Grating

Aberration Corrected Plane Holographic Grating

Variable Line Spaced Plane Holographic Grating

Constant Ruling Density Spherical Holographic Grating

Aberration Corrected Spherical Holographic Grating

Variable Line Spaced Spherical Holographic Grating

Aberration Corrected Toroidal Holographic Grating

Specifications and Control

Ultimate Specification

Standard Specification

Control

Dimension

Up to 250 mm length

Radius of Curvature

Down to 0.01%

0.5%

Calibrated Samples
LTP measurements

Slope Error

Down to
0.1 arcsec rms

0.2 arcsec rms

LTP measurements
Interferometer

Microroughness

Down t0 2 Å rms

5 Å rms

Micromap measurements

Substrate

Silicon
Fused Silica
SiC CVD

Coating

Au
Pt
AlMgF
Ni

Cr binding layer

Quartz monitoring

Groove Density

Optimised using JY proprietary software according to required optical layout

Moiré Fringes (JY Patent)
Optical control using recording layout (JY Patent)

Efficiency

Groove depth and duty cycle ratio optimised by JY proprietary software according to required optical layout

Groove Depth

+/- 5%

+/- 10

AFM measurements

c/d Ratio

+/- 5%

+/- 10

AFM measurements

Examples of Spherical Aberration Corrected Holographic Gratings

Size mm

Optical Surface mm

Slope Error arcsec rms

Microroughness Å rms

Coating

Substrate

200x50x30

190x45

0.2 arcsec rms

Less than 5

Au or Pt

Silicon
Fused Silica

150x30x30

140x20

0.2 arcsec rms

Less than 5

Au or Pt

Silicon
Fused Silica

75x15s150

70x10

0.1 arcsec rms

Less than 5

Au or Pt

Silicon
Fused Silica

Note: Groove density is obtained by interference of two spherical wavefronts.