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VUV Links Index VUV Monochromators Vacuum UV Monochromators Beamline Monochromators Vacuum Toroidal Monograph VUV Mirrors & Gratings VUV Optics Index Toroidal Mirror Cylindrical Mirror Spherical Mirror Plane Mirror Constant Ruling Density Plane Holographic Grating Aberration Corrected Plane Holographic Grating Variable Line Spaced Plane Holographic Grating Constant Ruling Density Spherical Holographic Grating Aberration Corrected Spherical Holographic Grating Variable Line Spaced Spherical Holographic Grating Aberration Corrected Toroidal Holographic Grating   Specifications & Control Ultimate Specifications Standard Specifications Control Dimension Up to 250 mm length Radius of Curvature Down to 0.01% 0.5% Calibrated Samples LTP Measurements Slope Error Down to 0.1 arcsec rms 0.2 arcsec rms LTP Measurements Interferometer Microroughness Down to 2 Å rms 5 Å rms Micromap measurements Substrate Silicon Fused Silica SiC CVD Coating Au Pt AlMgF Ni Cr binding layer Quartz monitoring Groove Density Deviation less than 0.1 gr/mm Moiré Fringes (JY patent) Efficiency Groove depth and duty cycle ratio optimised with JY proprietary software Groove Depth +/- 5% +/- 10% AFM measurements c/d Ratio +/- 5% +/- 10% AFM measurements Examples of Standard Holographic Gratings with Constant Groove Density Size mm Optical surface mm Slope Error arcsec rms Max Microroughness Å rms Coating Substrate 200x50x30 190x45 0.2 arcsec rms 5 Au or Pt Silicon Fused Silica 150x40x25 140x35 0.2 arcsec rms 5 Au or Pt Silicon Fused Silica 100x30x20 90x25 0.1 arcsec rms 5 Au or Pt Silicon Fused Silica

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