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VUV Monochromators Vacuum UV Monochromators Beamline Monochromators Vacuum Toroidal Monograph VUV Mirrors & Gratings VUV Optics Index Toroidal Mirror Cylindrical Mirror Spherical Mirror Plane Mirror Constant Ruling Density Plane Holographic Grating Aberration Corrected Plane Holographic Grating Variable Line Spaced Plane Holographic Grating Constant Ruling Density Spherical Holographic Grating Aberration Corrected Spherical Holographic Grating Variable Line Spaced Spherical Holographic Grating Aberration Corrected Toroidal Holographic Grating   Specifications & Control Ultimate Specification Standard Specification Control Dimension Up to 500 mm length Radius of Curvature Down to 0.01% 0.5% Calibrated Samples Slope error Down to 0.5 arcsec rms longitudinal 1 arcsec rms transverse 1 arcsec rms longitudinal 5 arcsec rms transverse Visual interferometric comparison to calibrated sample Microroughness Down to 2 Å rms 5 Å rms Micromap measurements Substrate Silicon Zerodur Fused Silica SiC CVD Coating Au Pt AlMgF Ni Cr binding layer Quartz monitoring Examples of Standard Cylindrical Mirrors Size mm Optical surface mm Radiuses of Curvature Slope Error arcsec rms Max Microroughness Å rms Coating Substrate 500x60x60 490x50 JY calibrated samples 1 arcsec rms longitudinal 5 arcsec rms transverse 5 Au or Pt Silicon Zerodur Fused Silica 300x50x40 292x42 JY calibrated samples 1 arcsec rms longitudinal 5 arcsec rms transverse 5 Au or Pt Silicon Zerodur Fused Silica 150x30x30 142x22 JY calibrated samples 1 arcsec rms longitudinal 1 arcsec rms transverse 5 Au or Pt Silicon Zerodur Fused Silica 75x15x15 70x10 JY calibrated samples 1 arcsec rms longitudinal 1 arcsec rms transverse 5 Au or Pt Silicon Zerodur Fused Silica

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