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VUV Links Index VUV Monochromators Vacuum UV Monochromators Beamline Monochromators Vacuum Toroidal Monograph VUV Mirrors & Gratings VUV Optics Index Toroidal Mirror Cylindrical Mirror Spherical Mirror Plane Mirror Constant Ruling Density Plane Holographic Grating Aberration Corrected Plane Holographic Grating Variable Line Spaced Plane Holographic Grating Constant Ruling Density Spherical Holographic Grating Aberration Corrected Spherical Holographic Grating Variable Line Spaced Spherical Holographic Grating Aberration Corrected Toroidal Holographic Grating   Specifications & Control Ultimate Specification Standard Specification Control Dimension Up to 250 mm length Radius of Curvature Superior at few tens of Km LTP measurements Slope error Down to 0.1 arcsec rms 0.2 arcsec rms LTP measurements Interferometer Microroughness Down to 2 Å rms 5 Å rms Micromap measurements Substrate Silicon Zerodur Fused Silica SiC CVD Coating Au Pt AlMgF Ni Cr binding layer Quartz monitoring Examples of Standard Plane Mirrors Size mm Optical surface mm Slope Error arcsec rms Max Microroughness Å rms Coating Substrate 200x50x30 190x45 0.2 arcsec rms 5 Au or Pt Silicon Zerodur Fused Silica 100x30x20 95x25 0.2 arcsec rms 5 Au or Pt Silicon Zerodur Fused Silica 75x15x15 70x10 0.1 arcsec rms 5 Au or Pt Silicon Zerodur Fused Silica

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