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VUV Links Index VUV Monochromators Vacuum UV Monochromators Beamline Monochromators Vacuum Toroidal Monograph VUV Mirrors & Gratings VUV Optics Index Toroidal Mirror Cylindrical Mirror Spherical Mirror Plane Mirror Constant Ruling Density Plane Holographic Grating Aberration Corrected Plane Holographic Grating Variable Line Spaced Plane Holographic Grating Constant Ruling Density Spherical Holographic Grating Aberration Corrected Spherical Holographic Grating Variable Line Spaced Spherical Holographic Grating Aberration Corrected Toroidal Holographic Grating   Specifications and Control Ultimate Specification Standard Specification Control Dimension Up to 300 mm length Radius of Curvature Down to 0.01% 0.5% Calibrated Samples Slope Error Down to 0.5 arcsec rms longitudinal 1 arcsec rms transverse 1 arcsec rms longitudinal 5 arcsec rms transverse Visual interferometric comparison to calibrated sample Microroughness Down t0 2 Å rms 5 Å rms Micromap measurements Substrate Silicon Fused Silica SiC CVD Coating Au Pt AlMgF Ni Cr binding layer Quartz monitoring Groove Density Optimised using JY proprietry software Moiré Fringes (JY Patent) Optical control using recording layout (JY Patent) Efficiency Groove depth and duty cycle ratio optimised by JY proprietary software according to required optical layout Groove Depth +/- 5% +/- 10 AFM measurements c/d Ratio +/- 5% +/- 10 AFM measurements Examples of Toroidal Aberration Corrected Holographic Gratings Size mm Optical Surface mm Slope Error arcsec rms Microroughness Å rms Coating Substrate 300x50x40 290x40 1 arcsec rms longitudinal 5 arcsec rms transverse Less than 5 Au or Pt Silicon Fused Silica 150x30x30 140x20 1 arcsec rms longitudinal 1 arcsec rms transverse Less than 5 Au or Pt Silicon Fused Silica 75x15x150 70x10 1 arcsec rms longitudinal 1 arcsec rms transverse Less than 5 Au or Pt Silicon Fused Silica Note: Groove density is obtained by interference of two spherical wavefronts.

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