NEW FILM THICKNESS MEASUREMENT SYSTEM FOR FLAT PANEL DISPLAYS, form Jobin Yvon

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NEW FILM THICKNESS MEASUREMENT SYSTEM FOR FLAT PANEL DISPLAYS.

Jobin Yvon Ltd. are proud to announce their NEW DIGISCREEN61" film thickness measurement system which is specifically designed to measure layer thickness uniformity over large substrates for the Flat Panel Display industry.

The system's large table is capable of holding substrates up to 1.2 x 1.0 m (61" diagonal) and as the table is almost vertical the tool's footprint is reduced to 2.5 m wide by 1.1m deep. The system uses multichannel spectroscopic reflectometry to perform a film thickness measurement in under a second and can fully characterise a sample at 60 different points within five minutes.

The system has been optimised to characterise thin films used by the flat panel display industry, including SiN, SiON, aSi, pSi, mSi over thickness ranges 120 to 1000 nm and SiOx from 300 to 1000 nm on either glass or metal coated glass substrates.

Comprehensive Windows NT based software allows both operators to produce homogeneity maps and engineers to optimise previously acquired results using an extensive materials database

Link to DIGISCREEN61

Click here for more information on the JY Range of Thin Film Products.