High Speed Spectroscopic Phase Modulated Ellipsometer For Thin Film Characterisation
The
UVISEL Spectroscopic Phase Modulated Ellipsometer allows the rapid
characterisation of thickness and refractive index of single and
multiple layer thin film structure. It is ideally suited to
semiconductor, polymer film, optical coating and biological applications.
The UVISEL is extremely
fast and by using a high speed photoelastic modulator driven at 50kHz
and digital signal averaging, a data acquisition rate of up to 1kHz
(average of 50 cycles) with excellent signal to noise ratio is
possible. This instrument provides versatile ex-situ operation when
used with a goniometer for automatic variable angle measurements, and
may also be used for in-situ work where the instrument can monitor
and control deposition / etch processes in real time.
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